MKS ASTRONhf++ AX7665

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Add Time: 2017-03-01 15:53:35
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introductionIntroduction

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Electrical
Operating Voltage Range200/208   VAC ±10%
Operating Frequency50/60   Hz
Current70   Amps RMS (per phase)
Voltage5%   (THD)
Voltage Imbalance10%   (per phase)
Source Impedance Ground10%
Leakage Current25   mA
Cooling   Water
QualityFacility   water
Filtration50   Micron
Minimum Flow RateDuring   Operation: 3.5 GPM
During Idle: 0.5 GPM
Cooling Channel Pressure Drop17   psi
Inlet Pressure100   psig
Inlet TemperatureMaximum: 30°C
Minimum: Ambient Dew   Point or 15°C
Typical Cooling Load<10   kW (NF3)
Lower Limit Flow Set Point3.5   GPM
Internal Cooling Wetted MaterialsCopper,   Stainless Steel
Ambient   Conditions
Operating Temperature40°C
Storage Conditions-25   to +85°C
Process   Gases
100% NF3Grade   4N

 

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